Microelectronics research at Chemnitz University of Technology

At the Faculty of Electrical Engineering and Information Technology, the following chairs organized within the Center for Micro and Nanotechnologies (ZfM) are particularly relevant

The technological processes for wafer processing, primarily on 150 mm and 200 mm wafers, are provided in clean room areas with a total area of 1300 m² (ISO4…ISO6). They cover the entire process chain from layer deposition for a wide range of materials, high-temperature processes, surface treatment, micro- and nanostructuring to wafer bonding, as well as extensive analytical technology.

The main areas of research are

Design and simulation of materials, components, and systems
Knowledge-based process models
Micro- and nanotechnologies, integration of new functional materials
Technologies and components for micro- and nanosystems
Testing and reliability

The Research Center for Materials, Architectures, and Integration of Nanomembranes (MAIN) is a central facility at Chemnitz University of Technology and also has selected equipment with a focus on exploratory research into the fundamental physical and chemical properties and the development of the engineering application potential of flexible nanostructured membranes (“nanomembranes”) as a new class of materials.

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Infrastructure	Environment
Research clean room Center for Micro- and Nanotechnologies Research Center for Materials, Architectures, and Integration of Nanomembranes (MAIN)	Faculty of Electrical Engineering and Information Technology Research areas at the Center for Micro- and Nanotechnologies: Advanced micro- and nanostructuring Nanostructuring 3D micro-machining Integrated optical components 1D/2D nanodevices Nanomaterial-based FETs for sensors and circuits Processes for manufacturing highly ordered nanomaterial films Strain-configurable nanodevices and nanomembranes Nanopackaging Advanced semiconductor packaging architectures Special processes for depositing and structuring new functional materials Integration of new (nanoscale) materials and nanofeatures into devices and systems MEMS technologies and devices Technologies for MEMS sensors and actuators (inertial and zero-energy sensors) Ultrasound (PMUT, CMUT), e.g., for photoacoustics MEMS meets MOEMS and photonics: optomechanical sensor technology Photonics and MOEMS Optical devices for spectroscopic applications Photonic systems and components in thin-film technology for PICs Use of effects at the molecular level for sensory applications MOEMS (Fabry-Pérot interferometer scanners) Molecular micro- and nanosystems Molecular-based electronics – alternative computer technologies – “beyond CMOS” (molecular logic; network-based bio-computing) Molecular-based biosensor systems and functional surfaces Miniaturized plasma systems MEMS-based sensors for measuring ion energy and ion angle distribution functions (IEDF, IADF) Atmospheric pressure plasma sources for optical spectroscopy Miniaturized ion drives for surface technology in the nanometer range Spintronics – XMR sensors and spintronic layer stacks Multidimensional magnetic field sensors based on XMR technology Laser annealing of magnetic multilayers Spintronics for the electronics of the future: high-frequency oscillators and non-volatile memory Process models Multiscale and multiphysics simulation Hybrid and data-driven modeling Surrogate and reduced-order modeling Advanced material and structural analysis Digital twins, process optimization Machine vision and intelligent measurement technology Sustainability Sustainability assessment in semiconductor technology Recycling of polymers
Teaching	Projects
Bachelor’s degree programs From high school diploma to bachelor’s degree Biomedical Engineering (B.Sc.) Electromobility and Renewable Energy Technology (B.Sc.) Electrical Engineering and Information Technology (B.Sc.) Master’s programs From bachelor’s to master’s Biomedical Engineering (M.Sc.) Design and Test for Integrated Circuits (M.Sc., English) Electromobility (M.Sc.) Embedded Systems (M.Sc.) Energy and Automation Systems (M.Sc.) Information and Communication Systems (M.Sc., English) Micro and Nano Systems (M.Sc., English) Microsystems and Microelectronics (M.Sc.) Regenerative Energy Technology (M.Sc.)	ForMikro-UpFUSE: BMBF joint project: Research into passive radio sensor systems for energy-autonomous shock and vibration monitoring EU project: Novel approaches for halogen-free and sustainable etching of silicon and glass (HaloFreeEtch) EU project: Automated monitoring of horticulture by spectral analysis with quantum dot detectors and high resolution optical -HORTIQD EU project: Single photon source and detector based on novel materials for the detection of endocrine disruptors – GREENER
Events	Miscellaneous
	Performance Center for Functional Integration in Micro/Nanoelectronics Dresden/Chemnitz

Microelectronics research at Chemnitz University of Technology

Infrastructure

Environment

Teaching

Projects

Events

Miscellaneous