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    Microelectronics research at the University of Kassel

    The University of Kassel (22,000 students, 3,350 employees, including 315 professors) focuses on two interdisciplinary research areas: “Multifunctional Materials and Multiscale Systems” and “Sustainable Transformations.” In the first area of focus, research groups from the engineering and natural sciences work together to investigate materials on all scales, from the macroscopic to the atomic level, and to transfer the results into novel applications.

    Together with the social sciences, groups from the engineering and natural sciences collaborate in the second transdisciplinary research focus to bring about sustainable change in society, achieve socio-ecological sustainability, and contribute to novel intelligent sustainable materials and applications in the fields of energy efficiency, green technologies, and electromobility.

    Facts & Figures

    Infrastructure

    Environment

    Institute for Nanostructure Technology and Analytics (INA)

    • 460m² clean room, micro- and nanostructuring of solid-state systems (semiconductors, metals, dielectrics) including component processing / material development

    • MEMS Smart Glass technology platform

    • Nanodiamond technology platform
    • Electron beam lithography system (1.6 nm beam diameter, 0.5 nm positioning accuracy, 100×100 mm² write field)

    • Dual-chamber molecular beam epitaxy system (Si/Ge + III-V compound semiconductors, 8″ sample holder)

    • III/V semiconductor epitaxy, semiconductor laser production

    FG Technical Electronics

    Prof. Dr. H. Hillmer

    • MEMS smart glass for personalized daylight control
    • Optical sensor arrays via nanoimprint
    • Energy efficiency/saving

    FG Technical Physics

    Prof. Dr. H.-P. Reithmaier
    Prof. Dr. C. Popov

    • Nanostructured materials (quantum dots on Si, GaAs, InP substrates)
    • Diamond production and nanostructuring for quantum optics
    • Nanocavity etched into diamond membrane

    • Semiconductor laser for high-bit-rate optical communication
    • Laser chip coupled into optical fiber

    FG Quantum Nano-Photonics

    Prof. Dr. M. Benyoucef

    • Development of single-photon sources (e.g., based on individual quantum dots) for quantum communication
    • Development of nanostructures on various substrates (Si, GaAs, and InP) and fabrication of resonators
    • Photonic nanostructures with integrated 2D materials

    Teaching

    Projects

    Department of Electrical Engineering / Computer Science

    https://www.eecs.uni-kassel.de

    • Bachelor’s in Electrical Engineering
    • Bachelor’s in Computer Science
    • Bachelor’s in Sustainable Electrical Engineering Systems
    • Master’s in Electrical Engineering
    • Master’s in Sustainable Electromobility
    • Master’s in Computer Science
    • Master’s in Electrical Communication Engineering (ECE)
    • Master’s in Renewable Energy and Energy Efficiency for the Middle East and North Africa Region (REMENA)
    • Master’s in Renewable Energy and Energy Efficiency (RE2)
    • Master’s in Functional Safety Engineering (FUSE)
    • Bachelor’s in Mechatronics (together with the Department of Mechanical Engineering)
    • Master’s in Mechatronics (together with the Department of Mechanical Engineering)
    • Bachelor’s in Vocational Education (together with the Department of Economics)
    • Master’s in Vocational Education (together with the Department of Economics)
    • Bachelor’s in Business Informatics (together with the Department of Economics)
    • Master’s in Digital Innovation and Transformation (together with the Department of Economics)
    • Bachelor’s in Industrial Engineering (together with the Department of Economics)
    • Master’s in Industrial Engineering (together with the Department of Economics)

    Department of Natural Sciences and Mathematics

    • Bachelor’s in Physics
    • Master’s in Physics
    • Bachelor’s degree in Nanostructure Sciences
    • Master’s degree in Nanoscience
    • DFG Research Training Group GRK 2749
      Biological clocks on multiple time scales, diamond-based sensors for detecting cell signals
    • LOEWE Research Center SMolBits
      Scalable Molecular Quantum Bits – Coordinated research project investigating an alternative quantum bit technology platform based on molecular quantum bits integrated on a semiconductor chip
    • BMBF project DIQTOK
      Diamond-based quantum tokens
    • BMBF project Competitive German Quantum Computer (CoGeQ)
      Production of photonic nanostructures in diamond for optimal light extraction from NV centers
    • BMBF project Diamond as a quantum material (DIAQUAM)
      Production of photonic components from diamond membranes
    • BMBF project Quantum Repeater Network (QR.N)
      Production of integrated photonic elements from diamond
    • BMBF MONOLOP
      Ultra-narrowband and widely tunable high-power laser light sources based on 1.55 µm quantum dot material, monolithically integrated on silicon
    • EU SEQUOIA
      Energy-efficient silicon transmitter using heterogeneous integration of III-V quantum dot and quantum dash materials
    • EU MOICANA
      Monolithic co-integration of quantum dot-based InP on SiN as a versatile platform for demonstrating high-performance and cost-effective PIC transmitters
    • BMBF PEARLS
      Photonic embedding of active region laser chips on silicon – heterogeneous integration of III-V quantum dot lasers on a Si photonics platform
    • BMBF Sunniness
      Micro-mirror arrays in building facades can achieve significantly improved brightness distribution in interior spaces. This leads to reduced use of artificial light during the day and uniform illumination of rooms with pleasant “natural” light.
    • BMBF SunExpress
      World’s largest MEMS micro-mirror arrays covering an area of 71 cm x 128 cm.
    • DFG MOSAIK (CINSaT cooperation)
      MEMS ring shutter arrays for improving the resolution of steep edges in interference microscopy.
    • DFG NANOSHAPE (CINSaT cooperation)
      Particle-filled thermoplastics with defined nanostructured particle geometry for the optimization of thermoplastics.
    • DFG- DeLiCom
      Development of deterministic quantum light sources from InP-based quantum dots in the telecom C-band.
    • DFG-Heisenberg
      This project investigates a wide range of topics in the fields of photonics and quantum optics.

    Events

    Miscellaneous

    Summer School

    Tokai University (Japan), University of Kassel

    The research groups at INA are part of the university’s overarching science center CINSaT (Center for Interdisciplinary Nanostructure Science and Technology). CINSaT is home to 32 groups from the University of Kassel. These include the departments of architecture, biology, chemistry, engineering (civil engineering, electrical engineering, and mechanical engineering), and physics. CINSaT was founded in 2002 and has been headed by Prof. Claudia Backes since 2025. It has six central research topics: 3D nanostructures, multiscale bioimaging, photonics, chiral systems, quantum technology, and nanomaterials.