Microelectronics research at BTU Cottbus-Senftenberg

Infrastructure

Environment

Senftenberg research clean room

Experimental Physics and Functional Materials

• Optoelectronic components: Combining nanostructuring with material integration for customized optical properties
• Materials research: Integration of Sn-containing alloy semiconductors on Si

Department of Applied Physics and Semiconductor Spectroscopy

• CMOS-compatible fabrication of cerium oxide-based sensor layers on nanostructured silicon
• In-situ and operando characterization and optimization of ALD coating processes
• Microspectroscopic material characterization of 2D and sensor materials

Department of General Electrical Engineering

• Analysis of solid-state surfaces for texture and material composition
• Investigation & method development for semiconductor structures, components, and assemblies

Semiconductor Materials

• Research into new materials for future microelectronic components

Micro- and Nanosystems

• Research and development of silicon-based MEMS components and systems based on them
• Virtual lab tour: https://icampus.th-wildau.de/vr/panorama/?q=294

Major projects:

• Innovation Campus Electronics and Microsensor Technology (iCampμs), total volume €20 million, duration 2022–2026
• “Optoelectronic Sensors for Application-Oriented Systems for Life Sciences and Intelligent Manufacturing” (OASYS), total volume €12.5 million, duration 2023–2028

Teaching

• B.Sc. Electrical Engineering
• B.Sc. Physics
• M. Sc. Electrical Engineering
• M.Sc. Physics
• M.Sc. Micro- and Nanoelectronics

Summer School “Characterization of Micro- and Nano-Materials”