ForLab Bochum is now a DFG Gerätezentrum (equipment center)

University cleanrooms in Germany make a significant contribution to basic research in the field of microelectronics and microsystems technology. At Ruhr University Bochum, a ForLab member, the Chair of Microsystems Technology, operates a 600 m2 cleanroom for microsystems and 2D electronics. The cleanroom at the Faculty of Electrical Engineering and Information Technology is used for research in collaboration with internal and external partners.

The cleanroom has now been registered in the DFG’s RIsources database as an equipment center, which simplifies its use and billing. The available equipment and terms of use are available online.

The cleanroom includes a MEMS production line for silicon-on-insulator processes and a line for 2D materials for next-generation microelectronics. Both lines are designed for 100 mm and 200 mm wafers and feature state-of-the-art equipment.

ForLab Bochum is committed to the nationwide networking of university cleanroom infrastructures as part of the BMFTR-funded ForLab NataliE project, together with TU Dresden and TU Ilmenau. In March 2026, the ForLab consortium will host the Microelectronics Symposium ’26 (FTME) in Bochum.

Cover photo: The ALD cluster system at ForLab Bochum. Photo: André Wirsig for ForLab