Mikroelektronikforschung an der Technische Universität Chemnitz

Infrastruktur

Umfeld

Forschungsreinraum

Zentrum für Mikro- und Nanotechnologien

Forschungszentrum für Materialien, Architekturen und Integration von Nanomembranen (MAIN)

Fakultät für Elektrotechnik und Informationstechnik

Forschungsfelder am Zentrum für Mikro- und Nanotechnologien:

Advanced Micro and Nanopatterning

• Nanopatterning
• 3D Micromachining
• Integrated optical devices

1D/2D Nanodevices

• Nanomaterial based FETs for sensors and circuits
• Process for highly ordered nanomaterial films
• Strain configurable nanodevices and nanomembranes

Nanopackaging

• Advanced semiconductor packaging architectures
• Special processes for the deposition and structuring of new functional materials
• Integration of new (nano scaled) materials and nanofeatures into devices and systems

MEMS Technologies and Devices

• Technologies for MEMS sensors and actuators (Inertial and zero energy)
• Ultrasonics (PMUT, CMUT), e.g. for photoacoustics
• MEMS meets MOEMS and photonics: Optomechanical sensing

Photonics and MOEMS

• Optical devices for spectroscopic applications
• Photonic systems and components in thin-film technology for PICs
• Utilisation of effects at the molecular level for sensory applications
• MOEMS (Fabry-Pérot interferometer Scanner)

Molecular Micro- and Nanosystems

• Molecular based electronics – Alternative Computing Technologies – „beyond CMOS“ (Molecular logic; Network-based BioComputing)
• Molecular based Bio-Sensing Systems and Functional Surfaces

Miniaturized Plasma Systems

• MEMS-based sensors for measuring the ion energy and ion angle distribution functions (IEDF, IADF)
• Atmospheric pressure plasma sources for optical spectroscopy
• Miniaturized ion thrusters for surface technology on the nanometer scale

Spintronics – XMR sensors and spintronic films stacks

• Multidimensional magnetic Field sensors based on XMR technology
• Laser Annealing of magnetic multilayers
• Spintronics for future electronics: high frequency oscillators and non-volatile memories

Process Models

• Multiscale and Multiphysics simulation
• Hybrid and Data-Driven Modelling
• Surrogate and Reduced Order Modelling
• Advanced Materials and Structure analysis
• Digital twins, process optimization
• Machine Vision and intelligent Metrology

Sustainability

• Sustainability assessment in semiconductor technology
• Recycling of polymers

Lehre

Projekte

Bachelorstudiengänge

Vom Abitur zum Bachelor

• Biomedizinische Technik (B.Sc.)
• Elektromobilität und Regenerative Energietechnik (B.Sc.)
• Elektrotechnik und Informationstechnik (B.Sc.)

Masterstudiengänge

Vom Bachelor zum Master

• Biomedizinische Technik (M.Sc.)
• Design and Test for Integrated Circuits (M.Sc., engl.)
• Elektromobilität (M.Sc.)
• Embedded Systems (M.Sc., engl.)
• Energie- und Automatisierungssysteme (M.Sc.)
• Information and Communication Systems (M.Sc., engl.)
• Micro and Nano Systems (M.Sc., engl.)
• Mikrosysteme und Mikroelektronik (M.Sc.)
• Regenerative Energietechnik (M.Sc.)

• ForMikro-UpFUSE: BMBF-Verbundprojekt: Erforschung passiver Funk-Sensorsysteme zur Energieautarken Erschütterungs- und Vibrationsüberwachung
• EU-Projekt: Novel approaches for halogen-free and sustainable etching of silicon and glass (HaloFreeEtch)
• EU-Projekt: Automated monitoring of horticulture by spectral analysis with quantum dot detectors and high resolution optical -HORTIQD
• EU-Projekt: Single Photon source and detector based on novel materials for the detection of endocrine disruptors – GREENER