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    Microelectronics Research at Ruhr University Bochum

    The Chair of Microsystems Technology focuses on all aspects of microelectromechanical systems (MEMS) as well as specific topics related to 2D semiconductors, from concept to cleanroom fabrication. Key research areas include new concepts in 2D electronics, time-integral sensors, microactuators, micro-nano integration, and system integration for specific application areas.

    The “Microelectronics Research Laboratory Bochum for 2D Electronics” (ForLab Bochum) provides essential core technologies in microsystems engineering and 2D semiconductor technology on substrates up to 200 mm in diameter. In addition, equipment at the Center for Interface-Dominated High-Performance Materials (ZGH) is maintained and utilized, particularly the plasma-based etching systems available there.

    The Chair of Microsystems Technology has equipment for the fabrication of semiconductor micro- and nanostructures. This includes, among other things, a PVD cluster for depositing thin films of metals, metal oxides, or metal nitrides; an ALD cluster for depositing 2D layers; and equipment for etching these layers using ALE or RIE processes. A laser lithography system and a mask aligner are available for patterning the layers.

    Electrical characterization is performed using semiconductor parameter analyzers, lock-in technology (up to f = 200 MHz), and capacitance-voltage measuring instruments. A SEM and an AFM enable the analysis of the topography and morphology of the thin films. A drop-shape analyzer is used to measure surface energy. An ellipsometer is used to determine film thickness and refractive indices. In addition, a confocal microscope and several optical microscopes are available.

     

    Infrastructure

    Environment

    Microelectronics Research Laboratory Bochum for 2D Electronics

    Project ForLab PICT2DES

    Research Center Zentrum für Grenzflächendominierte Höchstleistungswerkstoffe (ZGH)

     

    Faculty of Electrical Engineering and Information Technology 

    Chair of Microsystems Technology 

    • Microelectromechanical Systems (MEMS)
    • New Concepts in 2D Electronics
    • Time-Integral Sensors
    • Microactuators
    • Micro-Nano Integration
    • System Integration for Specific Application Areas

    Further Research Projects

    • FLEXMOS2: Flexible, high-speed thin-film transistors and circuits based on large-area two-dimensional transition-metal dichalcogenides (TMDs)
    • MARIE: Mobile Material Characterization and Localization by Electromagnetic Sensing
    • KOMMMA: Spatial actuation based on interacting electrostatic effects and their control
    • KOMMMA – Kick and Catch: Cooperative microactuators for freely moving platforms
    • ForMikro – FlexTMDSense: Research into novel, flexible sensor systems based on two-dimensional material systems
    • ForMikro – UpFUSE: Research on passive wireless sensor systems for self-powered shock and vibration monitoring
    • BMBF-Projekt PaSiC: Silicon-ceramic hybrid xubstrate as an integration platform for photoacoustic and optical applications
    • terahertz.NRW

     

    Education

    Other

    Degree Programs

    The faculty of Electrical Engineering and Information Technology offers two German-language degree programs and one English-language degree program:

    Study abroad and Double Degree

    Regular/scheduled offers:

    • One-day visits for school groups
    • School internships and the writing of research papers for individual students are available at the Chair of Microsystems Technology
    • The chair participates in several career information events at schools